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ULTRA HIGH PURITY GAS CONTAINER
INTERNAL BARREL POLISHING
- Roughness : 3S
- Moisture : Moisture less than 1 to 3 ppm
- Passivation time for gas filling(silane) : within 1 week

Model No. Gas Cyl’ Q’ty
(EA)
Water volume(L) W.Pressure(bar) T.Pressure(bar) kg/l
Cylinder(kg) Total(Kg)
Y-TON 440L SF6,NF3,N20
SIH4,PH3,NH3
1 440 166 276 556 706
Y-TON 470L 1 470 166 276 565 715